Silicon VLSI Technology: Fundamentals, Practice and Modeling

by James D. Plummer, Michael D. Deal, Peter B. Griffin

Unique in approach, this book provides an integrated view of silicon technology--with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies. Modern CMOS Technology. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers. Semiconductor Manufacturing--Clean Rooms, Wafer Cleaning and Gettering. Lithography. Thermal Oxidation and the Si/SiO2 Interface. Dopant Diffusion. Ion Implantation. Thin Film Diffusion. Etching. Backend Technology. For anyone interested in Fabrication Processes.

Genres: Textbooks, Electrical Engineering

817 pages, Hardcover

First published July 24, 2000

Reviews

[goei.shimon · Rating 5 out of 5]

A very important text for engineers or scientist working on semiconductor technology. The book can be used or applied to other materials system other than Si, which is the main emphasis at the given time frame of this book being written and published.

[محمد · Rating 5 out of 5]

good book

[Darshil Mehta]

Amazing