Focusing specifically on silicon devices, the Third Edition of Device Electronics for Integrated Circuits takes students in integrated-circuits courses from fundamental physics to detailed device operation. Because the book focuses primarily on silicon devices, each topic can include more depth, and extensive worked examples and practice problems ensure that students understand the details.
Definitely harder than Neamen's and Sze's books so not good for introduction especially when you study on your own. However, the content itself is really good, it really show physics in a clear a way. More theoretic so really good if you really want to understand semiconductor devices. Better than Sze. A good combination would be Neamen and this book.